Triple Beam Interferometer


SP-TR Series

  • The sensor head may be made of aluminium, stainless steel or invar
  • Open interfaces for OEM software under Windows and Linux
Technical Data:

  • Measurement range: up to 2 m with plane mirror
  • Beam distance: 12 mm
  • Angle resolution: 0.002 arcsec
  • Angle measurement with cat-eye reflector: until ±12.5°
Applications:

  • Laser-interferometric measurements on guides and translations, microscopes, measurement and positioning stages
  • High precision pitch and yaw corrections during biaxial or multi-axial length measurements
  • Calibration of metrological equipment and machine tools
  • Differential measurements (dilatometry, materials testing)
  • Extension of the measuring range for angle measurement upon requestzurück

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