Laser Interferometer


Datenblatt 44x44SP-NG Series

  • Flexible, ultra-precise length measuring system
  • Modern industrial design, protection against splash water
  • Single-beam measuring principle minimizes Abbe errors.
  • Plane mirrors and tilt-invariant reflectors are possible.
  • Compact system for on-site use possible
Technical Data:

  • Measurement range (max. distance reflector – sensor head): ≤ 2 m
  • Resolution: 20 pm
  • Maximum tilting angle of measuring reflector (Center of rotation in center of reflector):
    – plane mirror: ±1.5′
    – ball/hollow reflector: ± 26°
Applications:

  • Precision laser interferometric length measuring system as a measuring or calibration instrument for measuring and positioning stages, microscope stages, measuring machines, machine tools, hardness and materials testing instruments
  • Multiple coordinate measurements, e.g. on planar tables
  • Calibration of length measuring instruments
  • Eccentricity and concentricity measurements
  • Non-contact surface measurementszurück

SP_221x201SP Series

  •  Flexible, ultra-precise length measuring system
  • Single-beam measuring principle minimizes Abbe errors.
  • Plane mirrors and tilt-invariant reflectors are possible.
  • The measured object can be moved perpendicularly to the direction of measurement.
Technical Data:

  • Measurement range (max. distance reflector – sensor head): ≤ 2 m
  • Resolution: 20 pm
  • Maximum tilting angle of measuring reflector (Center of rotation in center of reflector):
    – plane mirror: ±1.5′
    – ball/hollow reflector: ± 26°
Applications:

  • Precision laser interferometric length measuring system as a measuring or calibration instrument for measuring and positioning stages, microscope stages, measuring machines, machine tools, hardness and materials testing instruments
  • Multiple coordinate measurements, e.g. on planar tables
  • Calibration of length measuring instruments
  • Eccentricity and concentricity measurements
  • Non-contact surface measurements

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SP-LR Series

  • High-precision length measurement over long distances
  • Hollow reflector ensures a high degree of tilt invariance
  • Several reflectors are suitable, plane mirrors, cat-eye and hollow reflectors
Technical Data:

  • Measurement range with beam expansion

2x: ≤40m
3x: ≤60m
5x: ≤80m

  • Resolution: 0.1 nm
  • Maximum permissible tilting angle of hollow reflector:   ±22.5°
Applications:

  • OEM measuring system or stand-alone unit
  • Single-axis or multi-axis design
  • Laser-interferometric precision length measurement and calibration of coordinate and length measuring machines, machine tools, measuring and positioning stages
  • Measurement of long linear guides with a critical tilt

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